Mass flowmeter
- MicroFlow's mass flowmeter series are mass flowmeters using the thermal flow sensor "μF sensor (Micro Flow Sensor)" independently developed by our company in the detection section.
- Using micro-machine technology, the fusion of ultra-fine flow sensor and advanced flow path design technology has achieved unprecedented high precision and wide adjustable ratio at a low price.
- Suitable for fuel gas and various industrial gas used in production process, experimental equipment, etc.
- Factory air flow management and usage management of each workshop, etc.
Specialty
MicroFlow's mass flowmeter series are mass flowmeters using the thermal flow sensor "μF sensor (Micro Flow Sensor)" independently developed by our company in the detection section.
Using micro-machine technology, the fusion of ultra-fine flow sensor and advanced flow path design technology has achieved unprecedented high precision and wide adjustable ratio at a low price.
It is suitable for flow control of fuel gas, various industrial gas, and factory air used in production processes, experimental equipment, etc., and consumption control of each workshop.
Mass flow detection
Regardless of the operating temperature and pressure of air and gas, the flow rate can be measured and converted into a standard state.
(*The flow rate in the standard state refers to the volume flow rate at 1 atm, 0°C (or 20°C).)
Wide measuring range
Compared with the low flow area of the maximum measurement flow rate, it is difficult for general gas flow meters to detect, but by installing the μF sensor, a wide range of measurement and control can be realized. The adjustable ratio of the mass flowmeter CMS is 100:1, and the adjustable ratio of the large flow mass flowmeter CML is 160:1 (the measuring range is 1,280:1).
It is most suitable for management of air and gas consumption, and air leakage management for energy saving.
Quick response
The sensor is in direct contact with the gas for detection, achieving a fast response.
Low pressure loss structure
Since the μF sensor is installed on the wall surface of the flow channel, there are few structures that hinder the flow of the fluid, and the pressure loss is low. It is most suitable for detection and control of low-pressure gas flow.
High precision
The mass flowmeter adopts the RD (reading) accuracy regulation, which realizes high-precision detection in a wide flow area.
Various functions
Through the technology of microcomputer accumulated in the control equipment, various functions that were not available in conventional mass flowmeters are installed.
Instantaneous/cumulative flow display, gas type switching function, upper and lower limit alarm output, analog output, cumulative pulse output, communication function, etc. (*varies by product)
Wide range of products
Products with a wide flow range from 0 to 500 mL/min to 0 to 1600 m³/h are available depending on the application.