Electric Bellows Pump F-EPB Series
Next-generation electric pumps for miniaturized semiconductor wafers. The structure development of the world's first (Note) CT pump, low dust generation, good defoaming performance, and high precision with a simple structure.
F-EPT series F-EPT06A1 type
- After the diaphragm and bellows, a new structure of the quantitative discharge pump is adopted
- Used liquid: photoresist, pure water, chemical solution (flammable substances are not allowed)
| maximum discharge pressure | Spit volume ml | Spit out. Input flow ml/s | |
|
| 0.15MPa | 0.5～6 | 0.1～4 |
F-EPT series F-EPT10A1 type
- After the diaphragm and bellows, a new structure of the quantitative discharge pump is adopted
- Used liquid: photoresist, pure water, chemical solution (flammable substances are not allowed)
| maximum discharge pressure | Spit volume ml | Spit out. Input flow ml/s | |
|
| 0.15MPa | 0.5～10 | 0.1～4 |