Air Filter Regulators

Corresponding to the prevention of particle contamination in a clean room with dust-proof, highly corrosion-resistant material treatment, etc.
Really control the quality of the air and adjust the pressure.
A wide variety of pressure gauges, indicators, and more.

Product desciption

Clean Standard Air Conditioning and Tempering Combination Filter Regulator FR Series

Filtration accuracy pressure setting	Handling air volume	Piping connection diameter
5μm 0.05～ 0.83MPa	100～3000 l/min	Rc1/8～Rc1/2

Clean Standard Air Conditioning and Tempering Combination Filter F Series

Filtration accuracy	Handling air volume	Piping connection diameter
5μm	100～3000 l/min	Rc1/8～Rc1/2

Clean Standard Air Conditioning and Tempering Combination Precision Filter MF Series

Filtration accuracy	Handling air volume	Piping connection diameter
0.3μm	300～1500 l/min	Rc1/4～Rc1/2

Clean Standard Air Conditioning and Tempering Combination Ultra-Precision Filter MMF Series

Filtration accuracy	Handling air volume	Piping connection diameter
0.01μm	150～750 l/min	Rc1/4～Rc1/2

Clean Standard Air Conditioning and Tempering Combination Regulator R Series

pressure setting MPa	Handling air volume	Piping connection diameter
0.05～0.83	100～ 3000 l/min	Rc1/8～Rc1/2

Clean Standard Air Conditioning and Tempering Combination Precision Pressure Regulator PR Series

pressure setting MPa	Handling air volume	Piping connection diameter
0.05～0.5	20～ 300 l/min	Rc1/8～Rc1/4

Clean Standard Purification Line Filter CLF Series

The filter element has a dual structure of PTFE membrane and PTFE non-woven fabric to ensure the stable performance of this product. 100% capture of 0.01μm fine particles
The parts used are precision cleaned in a clean room. Very few fine particles are attached and can be put into use immediately.

Filtration accuracy	Handling air volume	Piping connection diameter
0.01μm	100 l/min	Rc1/8～Rc1/4

Clean Standard Stainless Steel Regulator RS Series

It is most suitable for various solvents in liquid crystal and semiconductor related processes, carrying gas pressure control in pure water lines, jet pressure control, purified air, natural gas pressure control, etc., as well as food-related industries that require corrosion resistance and no need for lubricating oil. , Oil production line.

pressure setting MPa	Handling air volume	Piping connection diameter
0.05～0.7	0～ 800 l/min	M5～Rc1/4

Clean Standard Precision Stainless Steel Pressure Regulator PRS Series

It is most suitable for various solvents in liquid crystal and semiconductor related processes, carrying gas pressure control in pure water lines, jet pressure control, purified air, natural gas pressure control, etc., and can be set with high precision (sensitivity 0.001MPa)

pressure setting MPa	Handling air volume	Piping connection diameter
0.01～0.25	0～ 250 l/min	M5～Rc1/4